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AST currently offers the following key products and
services,
(1) PECVD(Plasma Enhanced Chemical Vapor Deposition) (2) Sputter (Magnetic Enhanced Sputter) (3) LPCVD (4) E-Beam Evaporator (Electron Beam Evaporator) (5) Resistance Heating Evaporator (6) Ion Beam Sputter
(1) ICP-RIE (Inductively Coupled Plasma Reactive Ion Etching) (2) RIE(Reaction Icon Etching equipment) (3) Ion Etcher (4) Plasma Asher (PR asher and Surface Improvement Equipment)
(1) Wafer Bonding System (2) Vacuum Furnace (3) RTA (4) OLED Coater (5) UHV Component component vacuuming equipment, components and supplies
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